ASML Holding NV said the fire at its Berlin plant affected part of the production area for some of its key machines and is working to determine how to minimise the potential impact on output.
The Berlin site makes various parts for its advanced extreme ultraviolet lithography machines, needed to make cutting-edge chips that are faster, cheaper and more efficient. ASML has a de-facto monopoly producing EUV machines for companies like Taiwan Semiconductor Manufacturing Co. and Samsung.
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